Parker Veriflo Division - 分析产品、调节器、阀门和聚四氟乙烯产品
Veriflo 仪器范围 Veriflo Instrumentation Range

Parker Hannifin 的 Veriflo 部门为全球客户提供经过验证的气体和流体输送系统和组件。他们有能力将多种技术集成到独特的解决方案中，这些解决方案需要在具有成本效益的封装中实现最高水平的精度和性能。 对于半导体工具制造商，Veriflo 提供超高纯度不锈钢和含氟聚合物配件、阀门、调节器和歧管，用于 VMB、CMB、工具模块、晶圆清洗、湿法蚀刻和其他专门的微电子加工应用。这个高科技市场在不断发展，派克提供广泛的产品组合来支持每个过程的清洁度和表面处理需求。

Veriflo 隶属于派克仪器仪表部，是用于气体和液体控制和应用的散装气阀、精密隔膜、调节器和流量控制组件的领先制造商。该集团的高质量关键流量组件是为全球过程仪表、超高纯度、分析、医疗和生物制药应用而开发的。 Veriflo, a Parker Instrumentation Division, is a leading manufacturer of bulk gas valves, precision diaphragms, regulators and flow control components for the control and application of gases and liquids. The group's high quality, critical flow components are developed for world-wide process instrumentation, ultra-high-purity, analytical, medical and biopharmaceutical applications.

压力调节器 Pressure Regulators

Parker Veriflo 提供一系列不锈钢和含氟聚合物减压调节器，用于关键半导体气体和湿化学和气体分配应用。所有调节器均按照最高质量标准制造，并因其性能、耐用性和可靠性而享誉全球。Parker Veriflo offers a range of stainless steel and fluoropolymer pressure reducing regulators for use in critical semiconductor gas and wet chemical and gas distribution applications. All regulators are built to the highest quality standards, and are recognized world wide for their performance, durability and reliability.

产品列表
UHP 单级、系紧隔膜压力调节器（入口压力高达 3,500 psig）——959W 和 NPR959W 系列
UHP 单级、系紧隔膜压力调节器（入口压力高达 3,500 Psig）——959W 和 NPR959W 系列
959W 系列系紧隔膜压力调节器专为高压 UHP 应用而设计。该系列具有出色的可靠性和泄漏完整性，非常适合用于气柜、阀组箱和上游工艺线。

UHP PTFE 含氟聚合物背压调节器（1/2 英寸）- BR-08 系列
UHP PTFE 含氟聚合物背压调节器（1/2 英寸）- BR-08 系列
BR-08 系列 PTFE 背压调节器适用于超高纯度和腐蚀性流体处理系统。其非泄压设计要求整个阀门有 5 psi 的压差，从而获得更好的下垂特性和低滞后。

UHP 高流量压力调节器 – 手动或圆顶加载（4.5 Cv，500 psig 入口，最大 1-1/2 英寸）– BFR5K 系列
UHP 高流量压力调节器 – 手动或圆顶加载（4.5 Cv，500 Psig 入口，最大 1-1/2 英寸）– BFR5K 系列
BFR5K 系列压力调节器以紧凑的封装提供高流量。其专利设计最大限度地减少了由于供应压力变化引起的出口压力波动，使其非常适用于 UHP 散装气体输送系统（流量高达 5000 slpm）。

单级压力调节器 - QR4000 和 NPR4000 系列
单级压力调节器 - QR4000 和 NPR4000 系列
QR4000 和 NPR4000 是气柜和散装气体分配的绝佳选择。专为增强泄漏完整性和涉及负输送压力的应用而设计。

UHP PTFE 含氟聚合物压力调节器（1/2 英寸）- PR-08 系列
UHP PTFE 含氟聚合物压力调节器（1/2 英寸）- PR-08 系列
PR-08 系列 PTFE 压力调节器专为超高纯度和腐蚀性流体处理系统而设计。其非泄压设计要求整个阀门有 5 psi 的压差，从而获得更好的下垂特性和低滞后。

超高纯度 (UHP) 表面贴装连接隔膜压力调节器 – SMSQ2Micro 系列
超高纯度 (UHP) 表面贴装连接隔膜压力调节器 – SMSQ2Micro 系列
SMSQ2Micro 系列压力调节器专为需要在小外壳内进行精确压力控制的 UHP 应用而设计。该产品的先进性能和规格使其非常适用于关键的半导体工具操作。

高性能、使用点调节器 - SQ 系列
高性能、使用点调节器 - SQ 系列
SQ 系列调压器是高流量、高性能的使用点调压器，设计用于气体公司、设备制造商和最终用户的工艺气柜。

超高纯 (UHP) 系紧隔膜压力调节器 – SQ2Micro 系列
超高纯 (UHP) 系紧隔膜压力调节器 – SQ2Micro 系列
SQ2Micro 调节器专为需要以小尺寸进行精确压力控制的 UHP 使用点应用而设计。该产品的先进性能和规格使其非常适用于关键的半导体工具操作。

UHP PTFE 含氟聚合物背压调节器（1/4 英寸）- BR-1 系列
UHP PTFE 含氟聚合物背压调节器（1/4 英寸）- BR-1 系列
BR-1 系列 PTFE 背压调节器具有高循环寿命和出色的耐腐蚀性。其非泄压设计要求阀门两端有 10 psi 的压差，从而确保在腐蚀性流体应用中稳定的上游压力。

UHP PTFE 含氟聚合物压力调节器（1/4 英寸）– PR-1 系列
UHP PTFE 含氟聚合物压力调节器（1/4 英寸）– PR-1 系列
PR-1 系列 PTFE 压力调节器具有高循环寿命和出色的耐腐蚀性。其非泄压设计要求阀门两端有 10 psi 的压差，从而确保在腐蚀性流体应用中稳定的下游压力。

FR1000系列UHP单级减压调压器
FR1000系列UHP单级减压调压器
FR1000 是一种超高纯度调节器，用于半导体和其他清洁工艺中的气体输送。具有中低流量，是阀组箱、气柜和其他半导体制造应用的绝佳选择

FR1400 系列 UHP 单级、高流量、减压调压器
FR1400 系列 UHP 单级、高流量、减压调压器
FR1400 是一种超高纯度、系紧隔膜、调节器，用于半导体和其他清洁工艺中的高压气体输送。能够高流量，是气瓶或使用点散装和特种气体应用的绝佳选择

UHP 大流量系紧隔膜压力调节器（最大 3/4 英寸）- FR1200 系列
UHP 大流量系紧隔膜压力调节器（最大 3/4 英寸）- FR1200 系列
FR1200 系列系紧隔膜调节器在入口压力高达 1,700 psig 时提供高流量和出色的泄漏完整性。它具有用于高灵敏度的低弹簧刚度，是超高纯度散装和特种气体输送系统的理想选择。

UHP Single Stage, Tied-diaphragm Pressure Regulator (up to 3,500 psig inlet) – 959W and NPR959W Series
UHP Single Stage, Tied-Diaphragm Pressure Regulator (Up To 3,500 Psig Inlet) – 959W And NPR959W Series
959W Series Tied-diaphragm Pressure Regulators are designed for high-pressure UHP applications. The series offers excellent reliability and leak integrity, and is ideal for use in gas cabinets, valve manifold boxes, and upstream process lines.

UHP PTFE Fluoropolymer Back Pressure Regulator (1/2 inch) – BR-08 Series
UHP PTFE Fluoropolymer Back Pressure Regulator (1/2 Inch) – BR-08 Series
The BR-08 Series PTFE Back Pressure Regulator is suited for ultra-high purity and aggressive fluid handling systems. Its non-relieving design requires a 5 psi differential across the valve, resulting in better droop characteristics and low hysteresis.

UHP High-flow, Pressure Regulator– Manual or Dome-loaded (4.5 Cv, 500 psig inlet, up to 1-1/2 inch) – BFR5K Series
UHP High-Flow, Pressure Regulator– Manual Or Dome-Loaded (4.5 Cv, 500 Psig Inlet, Up To 1-1/2 Inch) – BFR5K Series
The BFR5K Series pressure regulator offers high flow in a compact package. Its patented design minimizes outlet pressure fluctuation due to changes in supply pressure, making it ideal for use in UHP bulk gas delivery systems (flows up to 5000 slpm).

Single Stage, Pressure Regulator - QR4000 & NPR4000 Series
Single Stage, Pressure Regulator - QR4000 & NPR4000 Series
The QR4000 & NPR4000 are excellent choices for gas cabinets and bulk gas distribution. Designed for enhanced leak integrity and for applications involving negative delivery pressures.

UHP PTFE Fluoropolymer Pressure Regulator (1/2 inch) – PR-08 Series
UHP PTFE Fluoropolymer Pressure Regulator (1/2 Inch) – PR-08 Series
The PR-08 Series PTFE Pressure Regulator is designed for ultra-high purity and aggressive fluid handling systems. Its non-relieving design requires a 5 psi differential across the valve, resulting in better droop characteristics and low hysteresis.

Ultra-High Purity (UHP) Surface Mount Tied-diaphragm Pressure Regulator – SMSQ2Micro Series
Ultra-High Purity (UHP) Surface Mount Tied-Diaphragm Pressure Regulator – SMSQ2Micro Series
SMSQ2Micro Series pressure regulators are designed for UHP applications requiring precision pressure control in a small envelope. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.

High Performance, Point-Of-Use Regulators - SQ Series
High Performance, Point-Of-Use Regulators - SQ Series
The SQ Series of regulators are high flow, high performance point-of-use regulators designed to be used in process gas cabinets for gas companies, equipment manufacturers and end users.

Ultra-High Purity (UHP) Tied-diaphragm Pressure Regulator – SQ2Micro Series
Ultra-High Purity (UHP) Tied-Diaphragm Pressure Regulator – SQ2Micro Series
SQ2Micro regulators are designed for UHP point-of-use applications requiring precision pressure control in a small form factor. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.

UHP PTFE Fluoropolymer Back Pressure Regulator (1/4 inch) – BR-1 Series
UHP PTFE Fluoropolymer Back Pressure Regulator (1/4 Inch) – BR-1 Series
The BR-1 Series PTFE Back Pressure Regulator offers high cycle life and excellent resistance to corrosion. Its non-relieving design requires a 10 psi differential across the valve, thus ensuring stable upstream pressure in aggressive fluid applications.

UHP PTFE Fluoropolymer Pressure Regulator (1/4 inch) – PR-1 Series
UHP PTFE Fluoropolymer Pressure Regulator (1/4 Inch) – PR-1 Series
The PR-1 Series PTFE Pressure Regulator offers high cycle life and excellent resistance to corrosion. Its non-relieving design requires a 10 psi differential across the valve, thus ensuring stable downstream pressure in aggressive fluid applications.

FR1000 Series UHP Single Stage Pressure Reducing Regulator
FR1000 Series UHP Single Stage Pressure Reducing Regulator
The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

FR1400 Series UHP Single Stage, High Flow, Pressure Reducing Regulator
FR1400 Series UHP Single Stage, High Flow, Pressure Reducing Regulator
The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

UHP High-flow Tied-diaphragm Pressure Regulator (up to 3/4 inch) – FR1200 Series
UHP High-Flow Tied-Diaphragm Pressure Regulator (Up To 3/4 Inch) – FR1200 Series
The FR1200 Series Tied-diaphragm Regulator offers high flow and excellent leak integrity at inlet pressures up to 1,700 psig. It has a low spring rate for high sensitivity and is ideal for ultra-high purity bulk and specialty gas delivery systems.