超净应用（UHP）-高流量不锈钢隔膜阀-970系列 | #970AOPLPNCSFS8FF
Ultra-High Purity (UHP) High Flow Diaphragm Valve – 970 Series | #970AOPLPNCSFS8FF
派克汉尼汾970系列不锈钢隔膜阀

派克汉尼汾970系列不锈钢隔膜阀提供高流量，即0.70 CV值，以及优越的防止泄漏完整性，使其非常适合用于超高纯度半导体设备应用，包括气体控制箱、气体控制柜和阀门分配箱系统。作为仪器仪表流体控制系统技术的行业先行者，派克汉尼汾970系列不锈钢隔膜阀提供高流量，即0.70 CV值，以及优越的免泄漏完整性，使其非常适合用于超高纯度半导体设备应用，包括气体控制箱、气体控制柜和阀门分配箱系统（VMBS）。

970系列不锈钢隔膜阀具有内部和外部电抛光特性，从而在润湿表面上产生表面光洁度。这与其内部无弹簧和无螺纹设计相结合，导致气体捕获电位降低和颗粒物生成更小化。阀体由VeliFro低硫、高纯度Vericlean? 不锈钢，源自316L不锈钢制成，具有长寿命和耐腐蚀性强的特点。可更换式阀座，阀座是由PCTFE制造而成的，具有优异的关闭性能和较低的所有权成本。

970系列不锈钢隔膜阀在紧凑的封装中提供高流量，即0.70 CV值，这使得它适用于可工作空间受到限制的情况，例如气体控制箱、气体控制柜和阀门分配箱系统（VMBS）。它可以手动或气动操作，操作压力上限分别为250和150 psig。

970系列不锈钢阀门都是使用质谱仪测试阀座和阀座之间的氦气泄漏测试方法，以实现泄漏完整性，这是产品在应用中的性能和稳定性至关重要的特点。

超净应用（UHP）-高流量不锈钢隔膜阀-970系列 | #970AOPLPNCSFS8FF
Ultra-High Purity (UHP) High Flow Diaphragm Valve – 970 Series | #970AOPLPNCSFS8FF
派克汉尼汾970系列不锈钢隔膜阀

市场应用：
- 半导体生产
- 分析实验室
- 药物分析，生产
- 生物危害
- 航空航天

特点/优势：
- 5微米英寸Ra的标准表面光洁度
- 流量容量＝0.70 CV值
- 高循环寿命
- 内部无弹簧和无螺纹设计使颗粒产生和气体捕获更小
- 内部泄漏率：小于1×10-9 SCC/SEC（额定）
- 外部泄漏率：小于2×10-10SCC/SEC
- AOP气动压力：标称70～125磅/英寸
- 内部容积0.59毫升（包括面密封配件）
- 操作压力可高达：250磅/英寸（手动），150磅/英寸（AOP）

典型应用：
- 腐蚀性和特殊性气体
- 气体控制箱
- 煤气柜
- 阀门分配箱系统（VMB）

Vericlean 是派克汉尼汾公司的商标。

Ultra-High Purity (UHP) High Flow Diaphragm Valve – 970 Series | #970AOPLPNCSFS8FF

The 970 Series Diaphragm Valve offers exceptional cycle life, leak integrity, and cleanliness. It can be manually or air-operated and is ideally suited for use in high-flow UHP semiconductor applications.Parker 970 provides high flow and superior leak integrity, making it ideal for use in ultra-high purity semiconductor tool applications, including gas boxes, gas cabinets, and valve manifold boxes (VMBs).
The 970 Series design has no internally wetted threads or springs which minimizes particle generation and particle entrapment for reduced process contamination. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life in taxing applications. The 970 Series wetted components are fabricated from specialty materials to provide exceptional corrosion resistance and leak integrity. The internally electropolished body is manufactured from Parker’s proprietary UHP grade 316L stainless steel, Vericlean?. The diaphragm is a high strength Cobalt based alloy to maximize product life and the PCTFE, PEEK?, or Vespel? seat provides excellent chemical compatibility along with a robust shut-off performance.

The 970 series diaphragm valve offers high flow, .70 Cv, in a compact package, which makes it suitable for use in situations where workable space is limited, such as gas boxes, gas cabinets, and valve manifold boxes (VMBs). It can be manually, or air operated with a maximum operating pressure of 250 and 150 psig respectively.

All 970 Series valves are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, all valve seals (seat, and diaphragm) are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
- Semiconductor
- Analytical Laboratory
- Pharmaceutical
- BioPharm
- Aerospace
- Industrial

Applications:
- Corrosive and specialty gases
- Semiconductor Tools
- Tool Hook-ups
- Gas Cabinets
- Valve Manifold Boxes (VMB)

Features/Benefits:
- 5 micro inch (Ra) electropolish surface finish
- High cycle life (including corrosive service)
- Internally springless and thread less design minimizes particle generation and gas entrapment
- Fully functional from vacuum to 250 psig
- Internal leak rate: ≤ 1 x 10-9 scc/sec He
- External leak rate: ≤ 2 x 10-10 scc/sec He
- Flow Capacity: .7
VeriClean – TM Parker Hannifin Corporation, Veriflo Division
Vespel – TM DuPont Performance Elastomers L.L.C.
PEEK – TM Victrex plc.

技术规格：