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Parker PFA阀
Parker PFA Valves
UHP超高纯 PFA 手动隔膜(1/2") 3通阀 – MV-11 系列 UHP PFA Manual Diaphragm (1/2 inch) 3 Way Valve – MV-11 Series
MV-11 系列 PFA阀提供高泄露完整性和优异的耐腐蚀性。它有3通型,用于超高纯(UHP)和腐蚀性流体和气体处理应用(压力可达100 psig)。
The MV-11 Series PFA Valve offers high leak integrity and excellent resistance to corrosion. It is available in 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 100 psig).
MV-11系列是1/2"PFA隔膜阀,用于超高纯(UHP)和腐蚀性气体和液体处理系统,包括半导体制造操作。阀门有3通型,采用成型PFA阀体和精密加工密封区域,具有更高的泄露完整性和耐化学性。配备多功能安装底座,3通型允许更多的安装灵活性,减少接头的使用,使其有利于操作空间有限的区域使用。 The MV-11 Series is a 1/2 inch PFA manual diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive gas and liquid handling systems, including semiconductor manufacturing operations. The valve is available in 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance. With a multi-position mounting base, the 3-way configuration allows for increased mounting flexibility and connector fitting reduction, making it advantageous in areas where workable space is limited.
MV-11系列PFA阀门采用氟聚合物涂层不锈钢弹簧,降低腐蚀性环境的影响,确保与多种腐蚀性工艺介质的兼容。阀门配备一体式改性聚四氟乙烯隔膜,提供较之传统聚四氟乙烯更高的使用寿命。增加灵活性,MV-11系列阀门可配额套多种连接形式,包括Parflare和管接头。接头降低装配时间和安装成本,确保洁净至关重要的应用中无泄漏密封可靠性。
The MV-11 Series PFA valve features a Fluoropolymer-coated stainless steel spring which reduces the effects of corrosive environments and ensures compatibility with a wide range of aggressive process media. The valve is also equipped with a one-piece machine modified PTFE diaphragm, which provides higher cycle life when compared to conventional PTFE. For increased flexibility, MV-11 Series valves can be fitted with a variety of port configurations, including Parflare and Pargrip tube fittings. The fittings reduce assembly time and installation costs, while ensuring a leak-tight seal for reliability in applications where cleanliness is critical.
MV-11系列阀门的榫槽密封确保隔膜与阀体的可靠密封,形成高循环寿命。它的1/2"全通径提供紧凑结构的大流量。流量变化取决于接口尺寸和结构类型(高达3.7 C?v). The tongue and groove seal of the MV-11 Series valve ensures a positive diaphragm to body seal, resulting in high cycle life. Its full 1/2 inch orifice offers maximum flow capability in a compact package. Flow capacities vary depending on port size and configuration type (up to 3.7 Cv).
MV-11系列PFA阀可选潜水型,隔离元件与外部环境,使阀门在潮湿和气体腐蚀环境保持功能。
The MV-11 Series PFA valve is available with a submergible option, which isolates components from the external environment and allows the valve to remain functional while operating in wet or gaseous corrosive environments.
UHP PFA Manual Diaphragm (1/2 inch) 3 Way Valve – MV-11 Series
市场Markets:
- Semiconductor
- Analytical Laboratory
- Pharmaceutical
- BioPharm
- Aerospace
- Industrial
- 半导体
- 分析试验室
- 制药
- 生物制药
- 航空航天
- 工业
特点/优势Features/Benefits:
- Excellent leak integrity
- Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
- Available in 3-way configuration
- Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
- Full inch orifice provides maximum flow capability in a compact package
- Fully functional from vacuum to 100 psig
- Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
- Fluid temperature range: 0°F to +266° F (-17°C to +130° C)
- 优秀的泄露完整性
- 改性聚四氟乙烯隔膜和氟聚合物涂层不锈钢弹簧提供高循环寿命和优异的耐腐蚀性
- 有3通型
- 可配套多种连接形式,包Parflare和Parbond管接头
- 1/2"全通径,提供紧凑结构的大流量
- 工作压力:真空到100 psig
- 环境温度范围:0°F 至 +150° F (-17°C 至 +66° C)
- 流体温度范围:0°F 至 +266° F (-17°C 至 +130° C)
应用Applications:
- Corrosive and specialty gases
- Semiconductor Tools
- Tool Hook-ups
- Valve Manifold Boxes (VMBs)
- 腐蚀性和特殊气体
- 半导体工具
- 工具挂钩
- 阀组箱 (VMBs)
Technical Specifications
Wetted Material: |
PFA, Modified PTFE |
Non-Wetted Material: |
PFA, PVDF,Viton Seals, PTFE Coated SS Springs |
Pressure Rating: |
27" HG Vacuum (913 mbar) to 80 psig (5.5 bar) (COM TO NO), 27" HG Vacuum (913 mbar) to 25 psig (1.7 bar) Minimum (COM TO NC), 27" HG Vacuum (913 mbar) to 80 psig (5.5 bar) with 50 psig (3.4 bar) Maximum Back Pressure (NC TO COM) |
Maximum Ambient Temperature: |
66 °C, 150 °F |
Minimum Ambient Temperature: |
17 °C, 0 °F |
Maximum Fluid Temperature: |
130 °C, 266 °F |
Minimum Fluid Temperature: |
17 °C, 0 °F |
Flow Rate: |
Cv: 1.9, 2.8 |
Flow Coefficient: |
Kv: 27.1 to 40.0 L/min |
Flow Control: |
3 Way |
UHP PFA Manual Diaphragm (1/2 inch) 3 Way Valve – MV-11 Series 型号
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